Semiconductor Sensors
by Sze, Simon M.
1st edition · 1994 · Hardcover
ISBN 9780471546092
Book details
- Edition
- 1st edition
- Published
- 1994
- Publisher
- Wiley-Interscience
- ISBN-13
- 9780471546092
- ISBN-10
- 0471546097
- Pages
- 576
- Format
- Hardcover
- Language
- English
About this book
An interdisciplinary work offering an introduction to the basic principles and operational characteristics of semiconductor sensors. Describes sensor technology, stressing bulk and surface micromachining. Considers a sensor group related to a special physical, chemical or biological input signal. The final chapter deals with integrated sensors. Each chapter includes a summary, problem sets and a discussion of future sensor trends.