Semiconductor Sensors
by Sze, Simon M.
- Edition
- 1
- Published
- 1994
- ISBN
- 9780471546092
- Pages
- 576
- Publisher
- Wiley-Interscience
- Format
- Hardcover
- Language
- English
About this book
An interdisciplinary work offering an introduction to the basic principles and operational characteristics of semiconductor sensors. Describes sensor technology, stressing bulk and surface micromachining. Considers a sensor group related to a special physical, chemical or biological input signal. The final chapter deals with integrated sensors. Each chapter includes a summary, problem sets and a discussion of future sensor trends.
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