An Introduction to Semiconductor Microtechnology
by D. V. Morgan, K. Board
1983 · Paperback
ISBN 9780471901488
Book details
- Published
- 1983
- Publisher
- Wiley
- ISBN-13
- 9780471901488
- ISBN-10
- 0471901482
- Pages
- 167
- Format
- Paperback
- Language
- English
About this book
This introduction to semiconductor microtechnology covers the structure & manufacture of semiconductor devices. The Second Edition has been updated to reflect advances in the design & fabrication of semiconductor devices. Provides background material on semiconductor microtechnology & describes the properties of semiconductor materials & each step of the manufacturing process. Includes more photographs & larger diagrams; also provides instructional objectives & self-evaluation questions at the beginning of each chapter & problems at the end.
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